SEMIE5-0709原版完整文件.pdf

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1、 1 SEMI E5-0709 SEMI 1982,2009 SEMI E5-0709 SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT(SECS-II)This standard was technically approved by the global Information&Control Committee.This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13,2009.It wa

2、s available at www.semi.org in June 2009 and on CD-ROM in July 2009.Originally published 1982;previously published November 2008.NOTICE:The users attention is called to the possibility that some implementations of this standard,particularly those related to the use of Stream 4,may involve the use of

3、 inventions covered by U.S.patents 4,884,674 and 5,216,613,and by other patents issued or pending,held by Texas Instruments Incorporated.By publication of this standard,SEMI takes no position respecting either the applicability or the validity of these or other patent rights asserted in connection w

4、ith any item mentioned in this standard.Users of this standard are expressly advised that determination of any such patent rights and the risk of infringement of such rights,are entirely their own responsibility.Table of Contents 1 Purpose.3 2 Scope.3 3 Limitations.3 4 Referenced Standards and Docum

5、ents.3 5 Terminology.4 6 The Message Transfer Protocol.5 6.1 Intent.5 6.2 Message.5 6.3 Blocking Requirements.5 6.4 Message Header.5 6.5 Transaction Timeout.5 6.6 Multiple Open Transactions.6 7 Streams and Functions.6 7.1 Streams.6 7.2 Functions.6 7.3 Stream and Function Allocation.6 8 Transaction a

6、nd Conversation Protocols.7 8.1 Intent.7 8.2 Transaction Definition.7 8.3 Transaction Level Requirements.7 8.4 Conversation Protocols.7 9 Data Structures.8 9.1 Intent.8 9.2 Item.8 9.3 List.9 9.4 Localized Character String Items.9 9.5 Example Data Structures.10 9.6 Data Item Dictionary.11 9.7 Variabl

7、e Item Dictionary.53 9.8 Object Dictionary.62 10 Message Detail.72 10.1 Intent.72 10.3 Message Usage.73 10.4 Stream 0 and Function 0.73 10.5 Stream 1 Equipment Status.73 10.6 Stream 2 Equipment Control and Diagnostics.80 SEMI E5-0709 SEMI 1982,2009 2 10.7 Stream 3 Materials Status.99 10.8 Stream 4 M

8、aterial Control.113 10.9 Stream 5 Exception Handling.127 10.10 Stream 6 Data Collection.132 10.11 Stream 7 Process Program Management.142 10.12 Stream 8 Control Program Transfer.159 10.13 Stream 9 System Errors.160 10.14 Stream 10 Terminal Services.163 10.15 Stream 11 Host File Services(Deleted).165

9、 10.16 Stream 12 Wafer Mapping.166 10.17 Stream 13 Data Set Transfers.178 10.18 Stream 14 Object Services.190 10.19 Stream 15 Recipe Management.210 10.20 Steam 16 Processing Management.238 10.21 Stream 17 Equipment Control and Diagnostics.254 10.22 Stream 18 Subsystem Control and Data.260 10.23 Stre

10、am 19 Recipe and Parameter Management.265 11 Message Documentation.275 11.1 Intent.275 11.2 Standard Form SECS-II Document.275 12 Units of Measure.276 12.1 Intent.276 12.2 Units Symbols.276 12.3 Compliance.277 12.4 SECS-II Units of Measure Identifiers.278 RELATED INFORMATION 1.284 R1-1 The General N

11、ode Transaction Protocol.284 R1-2 Some Suggested Message Usage.284 R1-3 Notes on SECS-II Data Transfers.284 R1-4 Process Programs.287 R1-5 Suggested Baseline SECS Equipment Implementation.291 3 SEMI E5-0709 SEMI 1982,2009 1 Purpose 1.1 The SEMI Equipment Communications Standard Part 2(SECS-II)define

12、s the details of the interpretation of messages exchanged between intelligent equipment and a host.This specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.1.1.1 It is the intent of this standard to be fu

13、lly compatible with SEMI E4 Equipment Communications Standard(SECS-I).It is also the intent to allow for compatibility with alternative message transfer protocols.The details of the message transfer protocol requirements are contained in 6.1.1.2 It is the intent of this standard to define messages t

14、o such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment.The equipment,in turn,may be constructed with only minimal knowledge of the host.1.1.3 The messages defined in the standard support the most typical activities required

15、for IC manufacturing.The standard also provides for the definition of equipment-specific messages to support those activities not covered by the standard messages.While certain activities can be handled by common software in the host,it is expected that equipment-specific host software may be requir

16、ed to support the full capabilities of the equipment.2 Scope 2.1 SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol,such as SECS-I.2.1.1 SECS-II defines the method of conveying information between equipment and host in the form of messag

17、es.These messages are organized into categories of activities,called streams,which contain specific messages,called functions.A request for information and the corresponding data transmission is an example of such an activity.2.1.2 SECS-II defines the structure of messages into entities called items

18、 and lists of items.This structure allows for a self-describing data format to guarantee proper interpretation of the message.2.1.3 The interchange of messages is governed by a set of rules for handling messages called the transaction protocol.The transaction protocol places some minimum requirement

19、s on any SECS-II implementation.NOTICE:This standard does not purport to address safety issues,if any,associated with its use.It is the responsibility of the users of this standard to establish appropriate safety and health practices and determine the applicability of regulatory or other limitations

20、 prior to use.3 Limitations 3.1 SECS-II applies to equipment and hosts used in the manufacturing of semiconductor devices.Examples of the activities supported by the standard are:transfer of control programs,material movement information,measurement data,summarized test data,and alarms.3.1.1 The min

21、imum compliance to this standard involves meeting the few constraints outlined in 8.It is expected that a given piece of equipment will require only a subset of the functions described in this standard.The number of functions and the selection of functions will depend upon the equipment capabilities

22、 and requirements.For each piece of equipment,the exact format for each function provided must be documented according to the form outlined in 10.3.1.2 It is assumed that the equipment will define the messages used in a particular implementation of SECS-II.It is assumed the host will support equipme

23、nt implementation.4 Referenced Standards and Documents 4.1 SEMI Standards SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer(SECS-I)SEMI E6 Guide for Semiconductor Equipment Installation Documentation SEMI E148 Specification for Time Sychronization and Definition of the TS-Clock Objec

24、t SEMI E5-0709 SEMI 1982,2009 4 4.2 ANSI Standard1 ANSI X3.4-1977 Code for Information Interchange(ASCII)4.3 IEEE Standard2 IEEE 754 Standard for Binary Floating Point Arithmetic 4.4 The Japan Electronic Industry Development Association(JEIDA)has requested that the SECS-II standard incorporate suppo

25、rt for the JIS-8 codes for data exchange.This code would allow support for katakana characters in Japanese implementations of SECS-II.JIS-6226 JIS 8-bit Coded Character Set for Information Interchange,Japanese Industrial Standards.3 NOTICE:Unless otherwise indicated,all documents cited shall be the

26、latest published versions.5 Terminology 5.1 Definitions 5.1.1 The following brief definitions refer to sections providing further information.5.1.2 block a physical division of a message used by the message transfer protocol(see 6.3).5.1.3 conversation a sequence of related messages(see 8.4).5.1.4 c

27、onversation timeout an indication that a conversation has not completed properly(see 8.4.1).5.1.5 device ID a number between 0 and 32767 used in identifying the particular piece of equipment communicating with a host(see 6.4.1).5.1.6 equipment the intelligent system which communicates with a host.5.

28、1.7 function a specific message for a specific activity within a stream(see 7.2).5.1.8 host the intelligent system which communicates with the equipment.5.1.9 interpreter the system that interprets a primary message and generates a reply when requested(see 6.2).5.1.10 item a data element within a me

29、ssage(see 9.2).5.1.11 item format a code used to identify the data type of an item(see 9.2).5.1.12 list a group of items(see 9.3).5.1.13 message a complete unit of communication(see 6.2).5.1.14 message header information about the message passed by the message transfer protocol(see 6.4).5.1.15 multi

30、-block message a message sent in more than one block by the message transfer protocol(see 6.3.2).5.1.16 originator the creator of a primary message(see 6.2).5.1.17 packet a physical division of a message used by the message transfer protocol(see 6.3).5.1.18 primary message an odd numbered message.Al

31、so,the first message of a transaction(see 6.2 and 7.2).5.1.19 reply the particular secondary message corresponding to a primary message(see 6.2 and 7.2).5.1.20 secondary message an even-numbered message.Also the second message of a transaction(see 6.2 and 7.2).1 American National Standards Institute

32、,Headquarters:1819 L Street,NW,Washington,DC 20036,USA.Telephone:202.293.8020;Fax:202.293.9287,New York Office:11 West 42nd Street,New York,NY 10036,USA.Telephone:212.642.4900;Fax:212.398.0023;http:/www.ansi.org 2 Institute of Electrical and Electronics Engineers,IEEE Operations Center,445 Hoes Lane

33、,P.O.Box 1331,Piscataway,New Jersey 08855-1331,USA.Telephone:732.981.0060;Fax:732.981.1721;http:/www.ieee.org 3 Japanese Industrial Standards.Available through the Japanese Standards Association,1-24,Akasaka 4-Chome,Minato-ku,Tokyo 107-8440,Japan.Telephone:81.3.3583.8005;Fax:81.3.3586.2014;http:/www

34、.jsa.or.jp 5 SEMI E5-0709 SEMI 1982,2009 5.1.21 single-block message a message sent in one block by the message transfer protocol(see 6.3.1).5.1.22 stream a category of messages(see 7.1).5.1.23 transaction a primary message and its associated secondary message,if any(see 8.2).5.1.24 transaction time

35、out an indication from the message transfer protocol that a transaction has not completed properly(see 6.5).6 The Message Transfer Protocol 6.1 Intent SECS-II is fully compatible with the message transfer protocol defined by SECS-I.It is the intent of this standard to allow for compatibility with al

36、ternative message transfer protocols.The purpose of this section is to define the requirements of the interaction between an application using SECS-II and the message transfer protocol.The methods used to implement these requirements are not covered as a part of this standard.The terms used in this

37、standard are those used by SECS-I.Equivalent terms may be different for other message transfer protocols.6.2 Messages The message transfer protocol is used to send messages between equipment and host.The message transfer protocol must be capable of sending a primary message,indicating whether a repl

38、y is requested;and,if a reply is requested,it must be capable of associating the corresponding secondary message or reply message with the original primary message.The term originator will refer to the creator of the original primary message.The term interpreter will refer to the entity that interpr

39、ets the primary message at its destination and generates a reply when requested.6.3 Blocking Requirements The message transfer protocol must support the following SECS-II message blocking requirements.6.3.1 Single-Block Messages SECS-II requires that certain messages be sent in a single block or sin

40、gle packet by the message transfer protocol.Those messages defined in this standard as single-block SECS-II messages must be sent in a single-block or packet.The method used by the application software to tell the message transfer protocol that a particular message must be sent as a single block is

41、not covered as part of this standard.For compatibility with SECS-I,the maximum length allowed for a single-block SECS-II message is 244 bytes.The minimum requirement for the message transfer protocol is to be able to send single-block SECS-II messages.6.3.2 Multi-Block Messages For compatibility wit

42、h SECS-I,SECS-II messages that are longer than 244 bytes are referred to as multi-block messages.Also,certain SECS-II messages are allowed to be multi-block messages even if they otherwise meet the single-block length requirements.Certain older implementations may impose application-specific require

43、ments on block sizes for certain incoming messages.Beginning with the 1988 revision of the standard,new applications may not impose application-specific requirements on incoming block sizes.Applications implemented before 1988 may impose such requirements.6.4 Message Header The message transfer prot

44、ocol must provide the following information,called the message header,with every message.Only the content of the message header is defined by this standard.The exact format of the message header passed between the application and the message transfer protocol is not covered as part of this standard.

45、NOTE 1:In SECS-I,this information is contained in the 10 byte header of each block of a message.6.4.1 Device ID The message transfer protocol must be capable of identifying the device ID(032767)which indicates the source or destination of a message.6.4.2 Stream and Function The message transfer prot

46、ocol must be capable of identifying to SECS-II a minimum15 bit message identification code.In SECS-II,messages are identified by a stream code(0127,7 bits)and a function code(0255,8 bits).Each combination of stream and function represents a distinct message identification.6.4.3 Reply Requested The m

47、essage transfer protocol must be capable of identifying whether a reply is requested to a primary message.6.5 Transaction Timeout It is presumed that the message transfer protocol will notify SECS-II in the event of failure to receive an expected reply message within a specified transaction timeout

48、period.NOTE 2:In SECS-I,a transaction timeout occurs if either the reply timeout(T3)is exceeded before the first block of a reply message is received or if the interblock timeout(T4)is exceeded before an expected block of a multi-block message is received.SEMI E5-0709 SEMI 1982,2009 6 6.6 Multiple O

49、pen Transactions This standard allows,but does not require,the support of more than one concurrent open transaction.7 Streams and Functions 7.1 Streams A stream is a category of messages intended to support similar or related activities.7.2 Functions A function is a specific message for a specific a

50、ctivity within a stream.All the functions used in SECS-II will follow a numbering convention corresponding to primary and secondary message pairs.All primary messages will be given an odd-numbered function code.The reply message function code is determined by adding one to the primary message functi