rena清洗制绒设备培训.ppt

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1、,2011-5-1,Training For RENARENA培训,Overview/概述,Part 1:components of the rena/第一部分：RENA清洗机的组件Part 2:turn on the rena/第二部分：RENA的开机Part 3:operating system/第三部分：操作系统Part 4:turn off the rena/第四部分：RENA的关机,Part 1 Components of the RENA RENA清洗机的组件,1 InTex./InTex 1 台 2 intermediate transports(input station/ou

2、tput station)./进料台、出料台各1个 1 chiller./冷却器1个 1 electrical cabinet./电器柜1个 1 InOxSide./InOxSide 1 台 2 intermediate transports(input station/output station)./进料台、出料台各1个 1 chiller./冷却器1个 1 electrical cabinet./电器柜1个,intex/inOxSide,Chiller（冷却器）,Electrical Cabinet（电器柜）,Electrical Cabinet Inside 电器柜内部图,Chemic

3、al pipes and exhaust pipes 化学品供应管和排风管,CDA and DI-water pipes 压缩空气和纯水供应管,Hot air system 热风系统,General information/概述,InTexPurpose:washing the speck and etch a suede on the surface of the wafers./目的:清洗硅片表面的污渍，并在硅片表面刻蚀出绒面。InOxSide Purpose:remove the phosphor glass and the phosphor endowed silicon film f

4、rom the bottom surface and the edges of the wafers./目的:去除硅片表面的磷硅玻璃；去掉背面及四周的P-N结。,Working process/工作流程,Etch bath,Input station,Output station,ACD,Rinse 3,Acidic Rinse,Rinse 2,Alkaline Rinse,Dryer 1,Rinse 1,InOxSide,Etch bath,Input station,Output station,ACD,Rinse 3,Acidic Rinse,Rinse 2,Rinse 1,Alkali

5、ne Rinse,Intex,工作流程,制绒槽,上料台,下料台,干 燥,漂洗 3#,酸 洗,漂洗 2#,碱 洗,吹 干,漂洗 1#,InOxSide,刻蚀槽,上料台,下料台,干 燥,漂洗 3#,酸 洗,漂洗 2#,漂洗 1#,碱 洗,Intex,Stations/各槽子位置图,Stations,Station 1-Etch bath:The wafers are etched with an acid mixture./槽 1 制绒槽:用酸液在硅片表面刻蚀出绒面。Station 2-Rinse 1:The wafers are exempt from the media of the prev

6、ious station./槽 2 漂洗槽1:去除来自上一个槽子的化学品。Station 3-Alkaline clean bath:The wafers will be alkaline rinsed to avoid specking./槽 3 碱洗槽:用碱液清洗硅片表面的污渍。Station 4-Rinse 2:The wafers are exempt from the media of the previous station./槽 4 漂洗槽2:去除来自上一个槽子的化学品。Station 5-Acidic clean bath:The wafers surface will be

7、treated with an acid mixture./槽 5 酸洗槽:用酸液清洗硅片表面。Station 6-Rinse 3:The wafers are exempt from the media of the previous station./槽 6 漂洗槽 3:去除来自上一个槽子的化学品。Station 7 Air Channel Dryer:In the last step the wafers are air dried on both sides./槽 7 空气干燥槽:在最后一步中,硅片的两面使用热空气吹风干燥.,Part 2 Turn on the RENA第二部分 RE

8、NA 的开机,Step 1.Check the media supply such as DI-water、CDA、HF、HNO3、HCl、KOH and so on./检查气、水和化学品的外部供应。例如DI-water、CDA、HF、HNO3、HCl、KOH 等等.,InOxSide,Checking before power on/开机前检查,CDA,Cold-water,Checking before power on/开机前检查,Cold water,Turn on the RENA/RENA 开机,Step 2.power on,the switch is located at el

9、ectrical cabinet./第二步：开机，开关位于电器柜上Step 3.turn on the displayer；wait a moment./第三步：打开显示器，等待，直至主界面出现。Step 4.Login。Click the“Login”button at the main screen，enter the login name and the password at the message window，click“Login”./第四步：登陆。点击Login 进入登陆界面，输入用户名及密码，点击Login 进入。,Turn on the RENA/login RENA的开机

10、/登陆,User management/用户组管理,Dependent on the user group,various functions are enabled or disabled.(10.6.1)不同的用户组，拥有各种不同的权限。Operator操作工Process engineer(process)工艺工程师Service维护人员Administrator管理员,Part 3 operating system/操作系统,3.1 Main screen module overview/主界面模块概观In the main screen,a machine overview is s

11、hown.The main screen is divided into three areas.Info bar,Button bar,main screen.在主界面下，显示了机器的概观。主界面被分成3个区域：信息栏，按钮栏，主界面Conveyor modules:/传送带模块（滚轮模块）Conveyor 1 Conveyor 2 Conveyor 3,Main screen module overview 主界面模块概观,Process modules:/过程模块 Etch bath Dryer etch bath Rinse 1 Alkaline clean bath Rinse 2

12、Acidic clean bath Rinse 3 Air Channel Dryer,Software interface of RENA InTex RENA InTex 的软件界面,Software interface of RENA InOxSide RENA InOxSide 的软件界面,Status boxes and info box 状态框和信息框,第一个显示区域：模块操作模式。第二个显示区域：错误指示。第三个显示区域：模块状态显示。信息框，附加的显示区域，显示模块的一些重要的过程值。,Info bar/信息栏,In the info bar,the following inf

13、ormation is displayed:/在信息栏中，以下信息被显示：1.Time/时间2.Date/日期3.Operating mode:/操作模式-Current operating mode(OM)of the complete machine./当前机器的操作模式。4.Operating mode request:/操作模式请求-If an operation mode change-over is performed,this is always a request.The controller checks if the requested operating mode is

14、feasible.Decisive for this is the status of the individual modules.An OM change can take place only when all modules are available for the new OM.-在操作模式改变之前，都会发送一个请求给控制器。控制器再逐一检查请求的操作模式是否可执行，只有当所有的模块都准备好在新模式下运行之后，操作模式的改变才会成功。5.Login name:/登陆名-Name of the current user logged in the system./当前登陆系统的用户名

15、字,Button bar/按钮栏,Sign off from the System/从系统中退出Help file for currently visible main screen/当前界面的帮助文件User management/用户管理To the main screen media supplies/进入材料供应界面Back from media supplies/从材料供应界面返回主界面Return back to the main screen from all other screens/从其他界面返回主界面,Button bar/按钮栏,Operation modes of t

16、he machine/机器的操作模式 1.Mode Off/Off 模式 The background color of the status display is blue.The module is switched off and no outputs are switched on./该模式下状态的背景颜色是蓝色，所有模块是关闭的，没有任何输出。2.Mode Manual/手动模式 The background color of the status display is yellow.The module is in the manual mode./该模式下状态的背景颜色是黄色，模

17、块处于手动模式。3.Mode Service/维护模式The background color of the status display is red.The module is in the service mode./该模式下状态的背景颜色是红色，模块处于维护模式。4.Mode Auto/自动模式 The background color of the status display is green.The module is in the automatic operation mode./该模式下状态的背景颜色是绿色，模块处于自动模式。,Mode manual/手动模式,Mode S

18、ervice/维护模式,Mode Auto/自动模式,Button bar/按钮栏,进入维护子菜单进入手动子菜单进入配方参数子菜单进入手动补给功能概观界面进入趋势图子菜单进入过程值概观界面进入诊断子菜单关闭警告信息确认错误信息,Additional buttons in the main screen 主界面中附加的按钮,1.“Enter a note”button/输入记录This button opens a text editor.This provides the possibility for writing and saving text messages./打开一个文本编辑器，写

19、入并保存文本信息。2.“Stop”button/停止 按钮Stop the automatic operation of the machine./停止自动操作3.“Start”button/开始 按钮Start the automatic operation./启动自动操作4.“Test Lamps”button/测试信号灯 按钮Pushing this button,all lamps at the signal tower light up and the beeper sounds.Push again to stop./点击这个按钮，所有信号灯将被点亮，蜂鸣器响起。再点一次关闭。5.

20、“Reset Input”/“Reset Output”button/输入、输出计数复位 按钮This button resets the wafer counter of the input resp.output.6.“Lock windows”button/锁上前窗 按钮The Process engineer can lock and unlock the front windows.,3.2 Operate the software/软件操作,Make sure the status of modules are“Full DI”or“Full Chem.”and the windo

21、ws are closed./确认监测屏幕上显示各模块溶液均满槽（即Full DI、Full Chem)和设备门窗均关闭。“Etch Bath”status is“Not Ready”.“Dryer 1”and“Dryer 2”is“Ready”./Etch Bath 显示“Not Ready”，Dryer1,Dryer2 显示“Ready”。,system operating/系统操作,system operating/系统操作,Stop the conveyors/滚轮停止Click“Manual”button-click“F4”button three times/点击Manual 按钮

22、,随后点F4（三次）Click“Drives”button to enter the conveyor submenu/点击“Drives”，进入rives 菜单Click“All Conveyors”button-click“stop”button/点击All Conveyor,点击Stop 停止滚轮Click“F10”to return the main screen/点F10 退回主界面,Click“Manual”button,/点击Manual 按钮,Click“F4”button three times随后点F4（三次）,Enter the Drives submenu 进入driv

23、es 子菜单,Click“All Conveyors”button-“Stop”,click“F10”to return the main screen/点击“All Conveyor”,点击“Stop”停止滚轮，点F10 退回主界面,system operating/系统操作,Click“Mode Auto”to enter the Auto operating mode./点击Mode Auto 按钮，设备进入自动模式.The machine will pump up the chemical from Tank to etch bath,the status will be“Fillin

24、g ch.”with yellow color.Then,waiting until the filling chemical process completed./设备将自动开始从Tank 中向Etch bath 添加腐蚀液，界面上Etch bath 单元下方显示为黄色“Filling chemie”和黄色not ready,等待Etch bath 添加完成，,The mode field change from yellow“Manual”to green“Auto”/黄色“Manual”转变成绿色“Auto”,system operating/系统操作,Waiting until the

25、 filling chemical process completed./等待化学品添加完成，When the process completed the status of the etch bath will be“Full chem.”with green color.The second display field will be“Ready”with green color./下方状态显示为绿色“Full chem.”和绿色“Ready”。,waiting until the filling chemical process completed./等待化学品添加完成,3,system

26、 operating/系统操作,Click the“start”button,all modules will be in process.then,the operator can insert the wafers.随后点击“start”按钮各模块自动运行然后，操作工可以开始放如硅片了。,After click“start”button,all of the modules will be“Ready”and“In Process”./点击“start”按钮之后，所有的模块状态变成“Ready”和“In Process”。,Signal light/信号灯,Signal light/信号灯

27、,The signal light provides quick information about the operating status of the machine./信号灯可以快速的显示机器的当前操作状态。With the machine switched on,the following signals apply:/当机器打开之后，下表中的信号表示着不同的状态:,Part 4 Turn off the rena/RENA 的关机,1.Please make sure that there is no wafers in the machine./确保机器中没有硅片。2.Click

28、 the“Stop”button at the bottom of the interface./点击界面下方的“Stop”按钮。3.Click“Mode Manual”button to enter the manual mode.then,click“Manual”-“Etch Bath”-“Drain bath”/点击“Mode manual”按钮进入手动模式，选中“Etch bath”，点击Drain Bath,即把Etch bath 中的反应液排到Tank内。4.Press“F10”to return the main screen./点击F10 退回主菜单,Click the“St

29、op”button at the bottom of the interface./点击界面下方的“Stop”按钮。,Click“Mode Manual”button to enter the manual mode/点击“Mode manual”按钮进入手动模式,Click“Drain bath”to drain the chemical from“etch bath”to“tank”/选中“Etch bath”，点击Drain Bath,即把Etch bath 中的反应液排到Tank内。,Turn off the RENA/RENA 的关机,5.Waiting for the Etch B

30、ath until display“Empty”with yellow color./等待Etch bath 排液完成，在Etch bath 模块上只显示为黄色“not ready”。表明液体排完6.Click“Mode Off”button to enter the Off mode./点击“Mode Off”按钮，进入Off模式7.Closing the front windows./关机前窗8.Click“logoff”button,the logoff window will be show.Click“logoff”button in the new window,the front

31、 windows will be locked./点击右上角的“Log off”，跳出一个对话框。点击对话框中“Log off”，门将被密封。9.Turn on the displayer.Power off./关掉显示器，关闭设备电源。,Make sure the Etch Bath module shows“not ready”and“draining”with yellow color/确认“Etch Bath”模块显示黄色的“Not ready”和黄色的“Draining”,Make sure the status of the modules 确认各槽子的状态,Click“logoff”button,the logoff window will be show.Click“logoff”button,the front windows will be locked.点击“logoff”按钮，点击新窗口中的“logoff”，前窗将被锁上,Training for rena,Thats all.Thank you./谢谢，再见。,