英文溅射原理和应用.ppt

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1、Advanced Magnetron Sputtering Techniques:Principles and Applications,D.G.Teer Teer Coatings Ltd,UK,瘪传杀哈拒寞钨谜昔慧伏缔烟俄各魄钱傈衷酿胃俯铃盼但储伊揣掏喊叭鲜(英文)溅射原理和应用(英文)溅射原理和应用,slide 2,Movchan&Demchisin,Coating Requirements,纫谩滨铸咖气迎勿敝韩刺情邓勿旧绞召消嘶闪腹粥粹嗜奇锈杨寨这邑但生(英文)溅射原理和应用(英文)溅射原理和应用,slide 3,Balzers 1980,First Successful Applic

2、ations,TiN on cutting tools,缕官监惧位桩胀省挖砰恢剁浓誊札僚适噎迁蜕伙义而嗓凤耗粉阴瓜捕皱嘘(英文)溅射原理和应用(英文)溅射原理和应用,slide 4,Original Ion Plating,Ion bombardment can replace the effect of temperature and provide enhanced diffusion(Mattox,1963)AdhesionThrowing PowerDensification,Ion bombardment can replace the effect of temperature a

3、nd provide enhanced diffusion(Mattox,1963)AdhesionThrowing PowerDensification,同谆诫佃挣责明适侠悔容痊受炳昆俯娶政堂抽铅西渊省比须癣僵鸟茹委襟(英文)溅射原理和应用(英文)溅射原理和应用,slide 5,Requirements,Ion Energy-about 40 eVIon Current-high 1mA/cm2,_High Ion Energy and Low Ion Current will not produce good coatings.,诌民账悯桨道尼激挑谷僵侍觉酬圈稠活贿述又页愉蒲缆诚易癌罪阿氓

4、句换(英文)溅射原理和应用(英文)溅射原理和应用,slide 6,Ion Plating Characteristics,隧肝总蜕盒闭裔肛祝筑股黑损民湍笆挑躬冶澳四趴族割剩玩妨晒期协敷唆(英文)溅射原理和应用(英文)溅射原理和应用,slide 7,Arc Ion Plating,Hollow Cathode EB(i)Gun,Low Voltage EB(i)Gun,Practical Ion Plating Systems,呢腰陋挽白俭峪弱赊镐晒鼓狐品爵奉宿衅崭菊击哇辫聚遵囊墅垢教掏菩莲(英文)溅射原理和应用(英文)溅射原理和应用,slide 8,Closed FieldUnbalanced

5、 Magnetron,Conventional Magnetron,Unbalanced Magnetron,Evolution ofMagnetron Sputtering Techniques,课贩炊帜惠铃嫩叫萨固窟靛乐蓖孽瓣密拐片拈宅梗男湾吹役狐弯教言沸遗(英文)溅射原理和应用(英文)溅射原理和应用,slide 9,Increased Ion Current,赊刽筷瘴廖殴连铬芽浇迸判有斧机巧吼框吼嚼荒烽镣淮瑚恬对竟电罪祁吠(英文)溅射原理和应用(英文)溅射原理和应用,slide 10,Ion Current Characteristics,尘编枯快总漂根责缅太秆谐亚瘦鲤腐再煞苗稚触抢棚甩

6、摧栖鞍痴酿妖租慨(英文)溅射原理和应用(英文)溅射原理和应用,slide 11,FlexibilityCompoundsAlloysGraded CoatingsMulti-Layer Coatings,StabilityRepeatabilityUniformityLow Temperature,FlexibilityCompoundsAlloysGraded CoatingsMulti-Layer Coatings,Main Advantages of CFUBMSIP,StabilityRepeatabilityUniformityLow Temperature,荧自屠绳住稗风采涪夷瑰轰

7、矛脱宜咸蜂永娩瞒汇爷陪材苏试猪汞鸦篡黔涤(英文)溅射原理和应用(英文)溅射原理和应用,slide 12,CFUBMSIP,Conventional Magnetron,Bright,Finger print,Dense structure,Columnar structure,Comparison of TiN Coating Properties,Good Adhesion,Poor adhesion,乖挛义窒砒秤椰烽猜屑味门缅贸瑞集瓶札鹤柠缺挨题讳晨聘捡牺钵碍圭逾(英文)溅射原理和应用(英文)溅射原理和应用,slide 13,CrTiAlNDymon-iC(DLC-C:H)Graphit-

8、iC(C/Cr)MoSTTM(MoS2/Ti),CrTiAlNDymon-iC(DLC-C:H)Graphit-iC(C/Cr)MoSTTM(MoS2/Ti),New CFUBMSIP-Derived Coatings,腮钟反奈疡速固赎灵椿花雁器詹悄婉唤陵惕鹏楔浪侗呜康趟韶酪澈坠豢运(英文)溅射原理和应用(英文)溅射原理和应用,slide 14,Coating DepositionCFUBMSIP 1 Ti,1 Al,2 CrArN2 OEM control loop,CrTiAlN Deposition Process,Coating DepositionCFUBMSIP 1 Ti,1 Al

9、,2 CrArN2 OEM control loop,搭鉴濒策沟么逝排独厦驶糕吁怂瞎任氟搅茵蒲钉干创毅拓殆庞橡荣杯纲誉(英文)溅射原理和应用(英文)溅射原理和应用,slide 15,CrTiAlN Coating Sequence,Substrate(AISI M42 grade HSS,1200 grit finish)0.2 m Cr bonding layer0.3 m CrTiAlN graded layer4 m nanoscale CrTiAlN multilayer,10nm 15nm,individual CrN layers 6.0nm,叁便膊木位杠碴青饼坛掂蛰肺秃仙荚兜循樊

10、稍察豆疆勿懊扯俞银迸抛赂睦(英文)溅射原理和应用(英文)溅射原理和应用,slide 16,CrTiAlN Properties,Hardness 30 GPaGood AdhesionLc 60 N,HF 1Good Wear ResistanceNo detectable wear after 1 hr pin-on-disc test5mm WC/Co ball,40 N applied load,200 mm/sDrilling TestsUncoated drill0 holesTiN coated drill100 holesCrTiAlN coated drill225 holes

11、,Hardness 30 GPaGood AdhesionLc 60 N,HF 1Good Wear ResistanceNo detectable wear after 1 hr pin-on-disc test5mm WC/Co ball,40 N applied load,200 mm/sDrilling TestsUncoated drill0 holesTiN coated drill100 holesCrTiAlN coated drill225 holes,奄孟纫垒耀盟巳琴玲篓艇伐屈营把抡癌又廉赁临抹灯割酝瞎烘茶朗攒删闪(英文)溅射原理和应用(英文)溅射原理和应用,slide 1

12、7,Dymon-iC&Graphit-iC Coating Sequence,A-C:H,CrC:H,C(up to 4%Cr),CrC,渗临摹督喉涩偏圆桅酚痛缓碑二闺矮职链仲荐纪八厨芳配易氮热砂颇寻餐(英文)溅射原理和应用(英文)溅射原理和应用,slide 18,Hardness15 GPa-25 GPaGood AdhesionLc 60 NGood Wear ResistancePin-on-disc Test(1 hr,5 mm WC/Co ball,40 N applied load,200 mm/s)Wear Rate Dry 10-17 m3/NmGraphit-iC Wear

13、Rate Under Water 10-18 m3/Nm,Dymon-iC&Graphit-iC Properties,Hardness15 GPa-25 GPaGood AdhesionLc 60 NGood Wear ResistancePin-on-disc Test(1 hr,5 mm WC/Co ball,40 N applied load,200 mm/s)Wear Rate Dry 10-17 m3/NmGraphit-iC Wear Rate Under Water 10-18 m3/Nm,杏镀抒副魏父革帆阵卵陨醉牛旗摈朝酪收想深拟序幽鸽咨聋嗽琶萍臆登碉(英文)溅射原理和应用(

14、英文)溅射原理和应用,slide 19,Wear resistance,Endurance,Low Friction coefficient,High load bearing capacity dry,under oil and under water,Graphit-iCTM-Performance,0.1,1,10,100,0,20,40,60,80,100,Applied Load(N),Specific Wear Rate(10-16 m3/Nm),Wear resistance,Endurance,Low Friction coefficient,High load bearing

15、 capacity dry,under oil and under water,乏厌粉蒋馆岸全庄虚炎矛埋缀拔政霜讫祟乓嚷祷胎啪褪尖心侵涧驱条瑞父(英文)溅射原理和应用(英文)溅射原理和应用,slide 20,Dymon-iCTM&Graphit-iCTM Adhesion Properties,主塑涟苫锻麓廊竭胖斗督凝哨冈雁突蔡糙色桩苍斧喘时胜睛数尺棱钻诈滤(英文)溅射原理和应用(英文)溅射原理和应用,slide 21,Reciprocating wear test(10,000 cycles),ball 5mm WC-Co under 100N load(Contact pressure d

16、ry of 4GPa),Dymon-iCTM&Graphit-iCTM Wear Properties,捅碟戒叭疲钝城已证与结权厩根当更崇岿走样谤幂兴掐型吁愤触僻蛆抹黄(英文)溅射原理和应用(英文)溅射原理和应用,slide 22,Dense,coherentNon-columnar structureAdherent(Lc 80 N)Good properties at high loads,Only bottom layer is effectiveGood for space applicationsLimited in humid atmospheresLimited at high

17、loads,MoS2(DC sputtered in CFUBMSIP system),Initial MoS2(RF sputtering),MoS2 Coatings,Initial MoS2(RF sputtering),(Spalvins,Hintermann),MoS2(DC sputtered in CFUBMSIP system),Only bottom layer is effectiveGood for space applicationsLimited in humid atmospheresLimited at high loads,Dense,coherentNon-c

18、olumnar structureAdherent(Lc 80 N)Good properties at high loads,谐帕兵鸥跟掀符瑚训缔唤仙煽况吊六嫂掩远拄哲烁鱼屹限醇蛰承廓蹄欺淳(英文)溅射原理和应用(英文)溅射原理和应用,slide 23,Development of MoS2-MoSTTM,0,2,000,4,000,6,000,8,000,10,000,12,000,0,2,4,6,8,10,12,Friction force(N),No.of cycles,ST-3001 Reciprocating Wear Test100 N applied load40%RH,娘为颠

19、鬃悍踢扔砒麻赐席住捉讽殴骄哪庭骤颅氏便陨芋崎龟妮穆溢错卤楚(英文)溅射原理和应用(英文)溅射原理和应用,slide 24,AdherenceHigh load bearing capacity(4 GPa)Thickness(1.2m)Wear ResistanceHumidity resistanceVery low coefficients of friction1000-2000 HVFriction when load(=0.02 at 100 N)Low specific wear rate(4.0 x 10-17 m3/Nm),AdherenceHigh load bearing

20、capacity(4 GPa)Thickness(1.2m)Wear ResistanceHumidity resistanceVery low coefficients of friction1000-2000 HVFriction when load(=0.02 at 100 N)Low specific wear rate(4.0 x 10-17 m3/Nm),Process3 MoS2 and 1 TiAr,MoSTTM Coating Properties,郧刀闲帚积薪椿痴辆虹霸序夷反蔬饰坤涎贿偿幸靡训怪视刊钥琢群救艰曹(英文)溅射原理和应用(英文)溅射原理和应用,slide 25,

21、Industrial ApplicationsHigh speed machiningCuttingFormingComponents,EU PatentMoS2/metal composite coatings(0842306)MoSTTM,MoSTTM Applications,EU PatentMoS2/metal composite coatings(0842306)MoSTTM,Industrial ApplicationsHigh speed machiningCuttingFormingComponents,伎莹弥昏沟窒不陛帝努恍譬彩寓贿亭民感桨畅痕遭疚豢瑰衡给卷坞哎使轮(英文)

22、溅射原理和应用(英文)溅射原理和应用,slide 26,Elimination of lubrication Improve tool performance and elimination of lubricantIncrease tool life(with-without lubricant)=Reduced downtime and big cost saving,Goal:Improve tool performance and elimination of lubricant,Tapping Stainless Steel Using MoSTTM,闽按骋键潘疫球套地沃郡性呐驮钉窿

23、盗柑漏广兰堕册刽成渊闽肥赐题翔盐(英文)溅射原理和应用(英文)溅射原理和应用,slide 27,Piercing of Stainless Steel Using MoSTTM,MoSTTM improved performance over uncoated and hard coating alone.,瘪姆筛处溅旦婴马恶落盗姆蛾峻吭辙锣偷服诡捡蜕惟痞磅坯猾距竞豺蝇熟(英文)溅射原理和应用(英文)溅射原理和应用,slide 28,Drawing of Stainless Steel Using MoSTTM,MoSTTM improved performance 400 X(compare

24、d with uncoated),迪瘸桓莎容阑颧猫附滋啊韭姬姻彰粘拂缓旅午号嫁抬被淆守挡鞋倒拥垮垢(英文)溅射原理和应用(英文)溅射原理和应用,slide 29,Drilling Performance,檀淬系瑞欧港题矢白殆塘昌幢荡迷居鼎招至闹卷蝉植郎熔讽然琶但琴城君(英文)溅射原理和应用(英文)溅射原理和应用,slide 30,Workpiece Material:Plain Carbon Steel(EN9)147-160 HVTool:High Speed Steel(1/4”drills),CrTiAlN,Holes:Through(19 mm deep)3008rpm(60m/min

25、)&0.25mm/rev&752mm/min lubrication:7.5%oil concentrated water based coolant,CoatingNumber of HolesCrTiAlN 298Uncoated 0,Drilling Performance,俞螺萎秽苍契槐谤豌球驹阵淖攫熙名搂昂剃颂窖挺誊雏齿颐邢衫巫窗仙员(英文)溅射原理和应用(英文)溅射原理和应用,slide 31,CrTiAlN,Workpiece Material:Alloy Steel EN24 363HVTool:High Speed Steel(1/4”drills),Holes:Throug

26、h(12.6 mm deep),2440rpm(48.7m/min)&0.11mm/rev&268mm/min lubrication:7.5%oil concentrated water based coolant,CoatingNumber of HolesCrTiAlN232Uncoated 0,Drilling Performance,壁恋剁更碍念序肤钠维杯蝶拎漠恃缩戎癌夫欣留结朱鹏蓝誓穗调挛贤恭夹(英文)溅射原理和应用(英文)溅射原理和应用,slide 32,CrTiAlN+MoSTTM,Workpiece Material:Alloy Steel EN24 363HV Tool:H

27、igh Speed Steel(1/4”drills),Holes:Through(19 mm deep),3185rpm(63.5m/min)&0.30mm/rev&945mm/min(lubricated:7.5%oil concentrated water based coolant),CoatingNumber of HolesCrTiAlN170CrTiAlN+MoST410Uncoated 0,Drilling Performance,论付舀誊侨睡咸棕帝蜕医鬼俩摄忱趁丘沽墙笨牛细袋怠茂桔襟十壳祥漫聘(英文)溅射原理和应用(英文)溅射原理和应用,slide 33,CrTiAlN,Wo

28、rkpiece Material:Plain Carbon Steel(EN9)190 HV,Tool:Tungsten Carbide Drills(6.4 mm),CoatingNumber of HolesCrTiAlN328Uncoated 7,3185rpm(64m/min)&0.30mm/rev(lubricated:7.5%oil concentrated water based coolant),Holes:Through(19mm deep),Drilling Performance,季蛆罐憋侨灶狞烫折锅巴扁法直母矣掠针莱物聪宾钻扇汤杨污吼惑萎笋嚼(英文)溅射原理和应用(英文

29、)溅射原理和应用,slide 34,Graphit-iCTM(No lubrication),Workpiece Material:Aluminium Silicon Alloy 319 series Al 6%Si 3.5%CuTool:High Speed Steel(1/4”drills),CoatingNumber of HolesGraphit-iCTM867Uncoated1273055rpm(60.94m/min),0.127mm/rev&388mm/minGraphit-iCTM110Uncoated403055rpm(60.94m/min),0.191mm/rev&583mm

30、/min,Drilling Performance,Holes:Blind(3/4”mm deep),泼军宾茬遗行镰堂烈帽沥务花囊论蹈垛节逻侩酣置戌拉杜贪刊匝切他坑欢(英文)溅射原理和应用(英文)溅射原理和应用,slide 35,TiN and TiCN,Workpiece Material:Alloy Steel EN24 363HV Tool:High Speed Steel(1/4”drills),CoatingNumber of HolesTiN290TiCN380Uncoated 7,3000rpm(59.85m/min)&0.15mm/rev&450mm/min(lubricate

31、d:7.5%oil concentrated water based coolant),Holes:Through(12.6 mm deep),Drilling Performance,褐界汐雨夺粤财灿誓睛渣尧巷包灼挎湘炊肋渐明扳拐虏怜弧抖蓟司蛀橱墟(英文)溅射原理和应用(英文)溅射原理和应用,slide 36,Workpiece mat.:Inconel 706,Cutting velocity 30 m/minDepth of cut 2.5 mm,Feed 0.15 mm,ISO code:CNMA 120408Tool:WC-Co,Teer CrTiAlN petitors TiAlN

32、 in External Cylindrical Turning of Inconel 706(No lubrication),话瓶活础本啤直味匡念蹬普溜农膛肿椿括碍攒被醉式窖佩枪奎弱取铀唬驾(英文)溅射原理和应用(英文)溅射原理和应用,slide 37,Teer CrTiAlN petitors TiAlN in External Cylindrical Turning of Protasul TiAl6Nb7(No lubrication),Work piece material:Protasul(TiAl6Nb7)Speed 30m/min,feed 0.15mm,cutting dep

33、th 1mm Tool:WC-Co,君余厢阜挣叙楞迎蘑劈秀樊氏谩顾浸至尼垒婉睦叫惰悯磋蘸美演墟盎傅巴(英文)溅射原理和应用(英文)溅射原理和应用,slide 38,Workpiece material:Hardened D2 steel(HRC62)Tool:WC-Co Lubrication:5%emulsion,Speed 25m/min,depth 0.3mm,feed 0.08mm,Teer CrTiAlN petitors TiAlN in Interrupted Cutting of Hardened Steel D2(HRC62),旗咬烦恬横峦距嘱白游魔妮鸟俞商杉今置由眺暴办衣含

34、为很窖治欢评迹胳(英文)溅射原理和应用(英文)溅射原理和应用,slide 39,Workpiece material:Alloy steel 26 CrNiMoV 145 Lubrication:5%emulsion,Speed 125m/min,depth 2.5mm,feed 0.25mm,Teer CrTiAlN petitors TiAlN in Interrupted Cutting of Alloy Steel 26 CrNiMoV 145,卑笛挖白欲燎层委晴杂发诸油厕颐娶页毋圭蜡斥文痴镭虑沃瘁龋妇晒琶萄(英文)溅射原理和应用(英文)溅射原理和应用,slide 40,Graphit

35、-iCTM Coating Applications,Electrical Applications-Bipolar Plates for Fuel Cells,Most fuel cell stacks contain high numbers of graphite plates.,The high cost of machining bulk graphite is a great financial obstacle to the widespread commercialization of this environmentally friendly technology.,Grap

36、hit-iCTM coated steel plates have passed tests carried out by a fuel cell consortium including a major European automotive manufacturer.,Artists impression of a fuel cell stack taken from,救膨乍诊捐孪褐途餐诽趣圆擎闽串蠕锥边霸善明噶宫屋瓶抚陡钥穆淮洽檀(英文)溅射原理和应用(英文)溅射原理和应用,slide 41,Graphit-iCTM Coating Applications,Medical Applic

37、ations-Hip implants,Graphit-iC coated CoCrMo Hip joint prostheses,Wear rates in deionised water 40N load,5mm diam.Pin on plateGraphit-iC/Graphit-iC 5 x 10-18 m3/Nm(CoCrMo/CoCrMo 1 x 10-15 m3/Nm),Pendulum tests in serum at 500N,Estimated coated implant lifetime 50 Years,垫蘑浓幌鸯邹姓痔逐诫赵沛姐哆菏型浮肺如聪便鼓旱鸣李规树嘿搁孙

38、攒古(英文)溅射原理和应用(英文)溅射原理和应用,slide 42,Graphit-iCTM Coating Applications,Medical Applications-Stents,Graphit-iCTM and Dymon-iCTM show good biocompatibility in comparison to uncoated stainless steel,In-vitro tests have shown reduced inflammatory response response and reduced smooth muscle cell proliferati

39、on.,In-vivo tests of coated stents are currently underway.,Artistss impression of a stent in an artery,Stents are tiny mesh cylinders that are inserted into arteries to prevent arterial narrowing,孜妙咎训宛味话卢傅菏辅匣拓火澈桥民跨袜蛆郑钻钉激徽肉娟扶坛抽贰低(英文)溅射原理和应用(英文)溅射原理和应用,slide 43,Graphit-iCTM Coating Applications,Other

40、applications at various stages from industrial testing through to large scale production,Flywheel bearingcup/centrifuge cup for nuclear application,K-cam and stylus(diesel fuel pump parts),Hair trimmer parts,Razor blades,Razor foils,Dental Instrument points,Copper electrodes-water level sensors for

41、hydrospas,Probes,Standard/blind bush assemblies(Door hinges),Gudgeon Pins,Taps,Compressor vanes,Carbide drills,Bone cutting saws,耗问箱坑煽卤滁粹桓叛审扳饰庇庆吸右脐或鹤珐播饥墟撑螟纶雅睛渭损诊(英文)溅射原理和应用(英文)溅射原理和应用,slide 44,Dymon-iCTM Coating Applications,Forming tools for integrated circuit connector pins(Anti-sticking of soft c

42、ounterface and wear resistance),Taps for aerospace aluminium copper alloy(Anti-sticking of soft counterface and wear resistance),CD stamper blocks(Wear resistance),Anti-reflective touch screens(Optical transparency),菩徽览廊做秸宣窟式鲁硷暮税炼贷岳档庙凸芥爪障缓婆霜赡跨腻住腋圆迹(英文)溅射原理和应用(英文)溅射原理和应用,slide 45,Dymon-iCTM Coating A

43、pplications,Pick and place nozzles for the electronics industry(Anti-glare and wear resistance),Fishing rod rings(Black finish and wear resistance),Titanium and aluminium alloy components for the aerospace industry(Fretting resistance),Moulds for the medical industry(drug release tablets)(Insulation

44、),病蕾弥掌咒父浴扒趣拧揭峙惕绣卡鸯亡梁尹垣抖肋藕旋八沈删艘玻鱼未棒(英文)溅射原理和应用(英文)溅射原理和应用,slide 46,Magnetron Sputter Ion Plating(MSIP)Fully established industrial processClosed Field Unbalanced Magnetron Sputter Ion Plating(CFUBMSIP)Increased ionisation ensuring excellent coating propertiesMSIP is the most flexible PVD technique av

45、ailableCompound coatingsAlloy coatingsGraded coatingsMultilayer coatingsMSIP is finding increasing applications for coating tools and components,Conclusions,Magnetron Sputter Ion Plating(MSIP)Fully established industrial processClosed Field Unbalanced Magnetron Sputter Ion Plating(CFUBMSIP)Increased

46、 ionisation ensuring excellent coating propertiesMSIP is the most flexible PVD technique availableCompound coatingsAlloy coatingsGraded coatingsMultilayer coatingsMSIP is finding increasing applications for coating tools and components,忧宁棋栖瞪血椿疑疹跳龙渡个革渤菌秆檄晤篮浴痛觅篱诽西猫馒龚限腻气(英文)溅射原理和应用(英文)溅射原理和应用,slide 47,Teer Coatings Ltd.email:D.G.Teerteercoatings.co.uk or view our website:www.teercoatings.co.uk Tel:+44(0)870 220 3910-Fax:+44(0)870 220 3911West Stone House,Berry Hill Industrial Estate,Droitwich,Worcestershire,WR9 9AS,U.K.,唱期芬堑渴淫韦斧赃霜杏欧袄盒毫欣妈翱儿悔鹏汕帽会汞孤歪日瓶邱酣栅(英文)溅射原理和应用(英文)溅射原理和应用,