ESD知识-经典的课件.ppt
《ESD知识-经典的课件.ppt》由会员分享,可在线阅读,更多相关《ESD知识-经典的课件.ppt(53页珍藏版)》请在三一办公上搜索。
1、ESD Best Practical Sharing,TITL QRA,ESD Best Practical SharingTITL,2,Index,ESD History Definition of ESD Material Reduce ESD Damaged Methodology ESD Check list,313141718464752,Page,2Index ESD History 313Page,Reminder that ESD is a serious problem in the entire electronics industry.提醒所有员工“静电”对IC材料的破坏
2、是一个非常严重的问题, 它是整个半导体所面临的一项挑战.,Why Do We Need ESD Training?,为何需要此ESD训练课程?,It is believed that 25% of all component failures are a result of ESD. 相信有大约25%的IC材料是因静电(ESD)的影响而遭破坏,3,Reminder that ESD is a serious,Electrical Over Stress(EOS)-The exposure of an item to a current or voltage beyond its maximum
3、 ratings. EOS - 指一个IC材料受到超过其所能负荷的电压,电流而遭受到破坏 的状态,Definitions定义,Electrostatic Discharge (ESD)-The transfer of electrostatic charge between bodies or surfaces at different electrostatic potential.ESD is a subset of EOS. ESD - 即静电放电之意.指不同电位的二个物体之间产生的电荷急骤流 动的现象.,4,Electrical Over Stress(EOS)-T,Conductor
4、s vs Insulators,带静电的絶缘体Charged Insulator,带静电的导体Charged Conductor,Conductor evenly distributes charge over entire surface平均分布于整个表面,Opposite polarity charges can exist on the same insulator.不同极性的电荷会同时存在絶缘体上,Conductor completelydischarges when grounded.,Insulatoars do not allow charge to flow.Grounding
5、 an insulator neither removescharge or prevents surface charges.,5,IC,Conductors vs Insulators带静电的絶缘,Static electricity has been a curiosity for many hundreds of years.,History,Today, special precautions are taken by industries where static sparks could cause an explosion,e.g., flour mills,hospital
6、operating rooms,etc . 在今天,静电所产生的破坏已引起工业界的注意.例如: 面粉厂的 尘爆, 院的手术过程,IC制造工业等.,After the invention of gun powder by the Chinese,it was no longer a curiosity for anyone manufacturing that product. 静电现象一直存在于人类历史中,以前则被认为是一种奇特的异象,6,Static electricity has been,Strange failures occurred,and the cause of the pro
7、blem was not easily seen with the optical microscopes-failure analysis read : cause unknown. 静电造成一些奇特而不易察觉的破坏,F/A分析的结论往往是: 原因 不明.,EOS/ESD is perhaps the most significant failure mechanism in the electronics industry today. EOS/ESD对半导体之元件的破坏,可能是当今半导体界最头痛, 也 是最严重的一个问题.,History,7,Strange failures occur
8、red,and,Fundamentals of Static - Tribocharging 磨擦产生静电,This situation occurs when one or both of the materials are insulators.但这种情况为发生在其中一种物质为 绝缘体,Whenever two dissimilar materials make contact and then are separated, a static charge is created.二种不同性质的物质碰在一起再分离也会产生静电.,8,Fundamentals of Static - Trib,
9、Triboelectric Series,Factors to consider:,Humidity: 湿度Speed of separation: 分离速度Type of material: 材料性质Contact area: 接触面积,Increasing Positive,Air:空气Human Hand:手Rabbit Fur:兔毛Glass:玻璃Mica:human hair:头发Nylon:尼龙Wool:毛Silk:丝Aluminum:锡Paper:纸Cotton:棉Steel:铜铁 Wood:木头Amber:Hard Rubber:橡胶Nickel,Copper,Brass,Si
10、lverPolyester:聚醋棉PolyethylenePolypropylene:软片PVC(Vinyl),Increasing Negative,9,Triboelectric SeriesFactors to,静电放电的模型,Human-Body Model, HBM) 人体放电模型 Machine Model, MM) 机器放电模型 Charged Device Model, CDM) 元件充电模型 模拟由个人之手指尖端放电至元件的现像,Grounded Surface,10,静电放电的模型 Human-Body Model, HBM,HBM 波形,C = 100 PF R = 1.
11、5 K,Standard,资料来源: 工研院电子所,11,HBM 波形 C = 100 PF Standard资料,自动组装之制造环境ESD 模型,电感,I(A),Time (ns),MM,12,自动组装之制造环境ESD 模型电感ITime (ns)M,CDM Event 的来源,CDM,测试机台 自动插件 IC的包装 (Tube),13,CDM Event 的来源CDM 测试机台13,Definition定义(1),1. Conductive material - ESD protective material having a surface resistivity less than 1
12、 x E5 ohms/square or a volume resistivity less than 1 x10E4 ohm-cm. 导体 - ESD保护物质其表面电阻系数小于 1x10E5 欧姆/单位面积或容积电阻系数小于 1 x 10E4 欧姆- 公分者.,14,Definition1. Conductive materi,Static dissipative material - A material having a surface resistivity of at least 1 x 10E5 ohms/square or 1 x 10E4 ohm-cm volume resis
13、tivity, but less than 1 x 10E12 ohm/square surface resistivity or 1 x 10E11 ohm-cm volume resistivity. 静电传导物质 - 表面电阻系数介于1 x 10E5 与1 x10E12 欧姆/单位面积,或容积电阻系数介于1 x 10E4 与1 x10E11 欧姆-公分者.,Definition定义(2),15,Static dissipative material -,3. Insulative material - A material having a surface resistivity of
14、at least 1 x 10E12 ohms/square or 1 x 10E11 ohm-cm volume resistivity. 绝缘物质 - 物质它的表面电阻系数大于 1x10E12 欧 姆/ 单位面积或容积电阻系数大于 1x10E11 欧姆-公 分者.,Definition定义(3),16,3. Insulative material - A mat,Insutatic Material - Material that minimizes the generation of static charge less than +/-200(TCP100V) volts when r
15、ubbed against itself, or when separated from itself or other similar materials.抗静电物质 - 物质若经自己相互磨擦或相互分开或与其它类似物质分开时不产生大于 +/- 200(TCP100V) 伏特的静电压者.,Definition定义(4),17,Insutatic Material - Material,Safety Area安全区域,The operation where all leads are at common voltage potential. (Wires are bonded and tie b
16、ar is not separated such as sealing, molding, PMI and so on.)材料所有的脚都在等电位. (已接线, 且脚尚未分离.如过炉, 压模, 压模前检查等区域).,18,Safety Area安全区域The operation,Equipment设备,a) Electrostatic Voltmeters/fieldmeters : 静电表b) Digital OHM Meter : 数位欧姆表c) Air Ionizer : 离子风扇d) Wrist strap or Foot Strap (Optional) : 静电手环或脚环e) Con
17、ductive Bag & Antistatic Magazine : 导电袋及抗静电管f) Caution Label : 提醒标签g) Anti-Static Void Filler : 抗静电泡垫h) Dissipative Table/Floor MAT (Optional) : 静电地毡或桌垫i) Esd protected work station : 无静电工作桌j) Caution Sign : 提醒广告牌k) ESD Protective Shoes Tester : 静电鞋测试器,19,Equipment设备a) Electrostatic,Digital OHM Mete
18、r 数位欧姆表,Shall be capable of measuring a dc resistance of 0.1 ohm through 1 megohm +/-10% with an open circuit voltage greater than 1.5 V. 三用电表或直流电阻表应可量测 0.1 欧姆到 1 M 欧姆 +/-10% 范围的电阻,且开路电压应大 于1.5 V 以上.,20,Digital OHM Meter 数位欧姆表Shall,Air Ionizer 离子风扇(1),The devices at work station must be within 4 fee
19、t maximum are measured by vertical line from the face of the ionizers and around 45 degrees on each side of this line. switched on and properly directed across the work surface.工作时必须置于距离离子风扇4英尺圆弧内, 两边各近似45度角范围内.且方向正对着工作区域 任何静电敏感的材料放于工作台之前, 必须把离子风扇先打开,而且中途不可关掉.,21,Air Ionizer 离子风扇(1)The device,1. Ion
20、izer Balance +/-35 V 余额电压 离子风扇的余额 = 30 cm, 5min. 小于 +/-35 V2. Ionizer charge decay time. 来量测离子风扇的放电衰退程度. 20sec,=30cm, 1000V reduce to 100V3. Blue tape will put under ionizer stream around 5 sec.then put wafer on it. 胶布撕下后,在离子风扇下大约吹5秒钟, 方可将芯片置于 其上,Air Ionizer 离子风扇(2),22,1. Ionizer Balance +/-35 VAir,
21、Wrist strap or Foot Strap (Optional) 静电手环或脚环 (1),Wrist strap connected to dissipative or conductivetable top through an integral 1M ohm +/-10% resistorshould be worn by operators. This way result in the wrist strap being 2 M ohm +/- 10% ground and is acceptable.静电环必须有 1 M 欧姆+/-10% 的电阻连接到导电或静电传导的工作桌面
22、. 若因此使得静电环与接地间形成2M 欧姆 +/- 10% 之电阻是可接受的。,23,Wrist strap or Foot Strap (Opt,The working resistor of wrist strip must be checked shiftily as following path, from the users hand, through the usersbody,the body-to-strap contact, the integral resistor, the strap wire, to the strap ground connector.And it
23、should be during 500k-10MEGA OHMS , record is required.静电环的工作电阻必须以如下的回路每班检验并做记录,而其阻抗值 需介于 : 或500k 到 10 MEGA 欧姆. 回路 带者的手 带者的身体 身体与手环接触点 1 M +/-10% 欧姆的静电环内含电阻 手环连接线 接地点 欧姆计,Wrist strap or Foot Strap (Optional) 静电手环或脚环 (1),24,The working resistor of wrist,Conductive Bag & Antistatic Magazine导电袋及抗静电管(1)
24、,1. All ESDS devices shall be packed in ESD protective packaging when not at an ESD protected area or work- station. 当不在静电防护区域或工作站时所有的静电敏感材料必须装 在静电防护包装之内.2. Conductive magazine, bag or container which Faraday cage container simulated will be used for all device transportation and storage. 材料在贮存或运送中必
25、须以导电管子,袋子或导电容器等法 拉第容器包装.,25,Conductive Bag & Antistatic Ma,3. Tube will be anti-static or conductive. 管子要用抗静电或导电的材质 The re-cycle period for anti-static tube used on line should not exceed one year. 在线用做循环使用之管子,使用期限不得超过一年。,Conductive Bag & Antistatic Magazine导电袋及抗静电管(2),26,3. Tube will be anti-static
- 配套讲稿:
如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。
- 特殊限制:
部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。
- 关 键 词:
- ESD 知识 经典 课件
链接地址:https://www.31ppt.com/p-1284547.html